There was an excellent article on micromachines in the December, 1998 (Vol.
25, No. 12) issue of IEEE Spectrum. Not only does the article have cool
pictures of micromachines like a micro-inertial measurement system, a pop-up
mirror and gear assembly, a hydrogen microsensor, and a micro steam-engine
(which doesn't require seals around the pistons due to the surface tension
of the liquid inside the piston), but it also does a good job of explaining
some of the manufacturing challenges of creating these devices in typical
fab lines.
The article is:
"The Broad Sweep of Integrated Microsystems"
S. Tom Picraux, Paul J. McWhorter (both of Sandia National Labs)
IEEE Spectrum, December, 1998, Vol. 25, No. 12, pages 24-33
The article also gives pointers to some web sites:
MEMS Information Clearinghouse
http://mems.isi.edu/
Sandia National Labs MEMS site
http://www.mdl.sandia.gov/micromachine/
Of the two, I prefer the Sandia Labs site, since it has a picture gallery:
http://www.mdl.sandia.gov/micromachine/images.html
As well as introductory materials:
http://www.mdl.sandia.gov/micromachine/overview.html
And a bibliography:
http://www.mdl.sandia.gov/micromachine/bibliography.html
- Jim